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Characteristics
Model
Flow rate @ 0 ° C and 101.3 kPa
D6F-10A @ -000
0-10 L/min
D6F-20A @ -000
0-20 L/min
D6F-50A @ -000
0-50 L/min
Joint type*
Case material
Applicable Gas**
Electrical Connection
Withstand Pressure (max.)
Accuracy
Operating Temperature
Storage Temperature
Operating Humidity
Output Signal
Current Consumption
Insulation Resistance
Dielectric Strength
Response Time (reference)
Manifold mount with ‘O’ Ring (A5 type) or Rc 1/4 (1/4” BSPT threaded)(A6 type)**
Thermoplastic resin
Air
Connector (3 wire)
500 kPa (about 72.5 psi)
±3% F.S. max, 25 ° C
-10 to +60 ° C (with no icing or condensation)
-30 to +80 ° C (with no icing or condensation)
85%RH max. (with no icing or condensation)
1 to 5 VDC, Analog Output (non-linear output)
15 mA max. (No-Load with V CC = 12 to 24 VDC, V SS = 0V and 25 ° C)
20M Ω min. at 500 VDC, between lead terminal and case
500 VAC, 50/60 Hz, for 1 minute. (Leakage current typ <1 mA.), between the lead terminals and the base
150 mS, typical
* Contact Omron for other thread types (A6)
** Contact Omron for other gases.
Operating Characteristics
6.0
5.0
4.0
3.0
2.0
1.0
0.0
D6F-10A
6.0
5.0
4.0
3.0
2.0
1.0
0.0
D6F-20A
6.0
5.0
4.0
3.0
2.0
1.0
0.0
D6F-50A
0.0
2.0
4.0
6.0
8 .0
10.0
0.0
4.0
8 .0
12.0
16.0
20.0
0.0
10.0
20.0
30.0
40.0
50.0
D6F-10A
Flo w rate(L/min)
Flo w rate(L/min)
Flo w rate(L/min)
Flow Rate L/min (normal)
Output Voltage (VDC)
0
1.00 ±0.12
2
1.75 ±0.12
4
2.60 ±0.12
6
3.45 ±0.12
8
4.25 ±0.12
10
5.00 ±0.12
D6F-20A
Flow Rate L/min (normal)
Output Voltage (VDC)
0
1.00 ±0.12
4
1.93 ±0.12
8
2.87 ±0.12
12
3.70 ±0.12
16
4.41 ±0.12
20
5.00 ±0.12
D6F-50A
Flow Rate L/min (normal)
Output Voltage (VDC)
0
1.00 ±0.12
10
2.45 ±0.12
20
3.51 ±0.12
30
4.20 ±0.12
40
4.66 ±0.12
50
5.00 ±0.12
24
MEMS Airflow Sensor
D6F-10A, -20A, -50A
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